Cleanroom-compatible mobile robot system "HERO Fab"
Cleanroom-compatible mobile robot system "HERO Fab"
In the front-end process of semiconductor manufacturing, we achieve automation in environments that require cleanliness with a robotic system that has a proven track record of numerous adoptions. It is equipped with safety mechanisms to prevent collisions with people working in the same space. (Examples of transport targets: MRSP, RSP, foup, HA200 box, Smif pod, etc.)
